Equipment
CHA
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CHA 600
18" X 30" HIGH S/S BELL JAR INFICON IC-6000 THICKNESS MONITOR AUTOTECH II AUTOMATIC/MANUAL VALVING ION/DUAL TC GAUGE TEMESCAL CV-8 POWER SUPPLY DIFFUSON PUMP (REBUILT) SINGLE POCKET GUN (REBUILT)... -
CHA Mark 40
26T X 26"DIAMETER CHAMBER LIFT OFF DOME FOR 6" WAFERS IC5 THICKNESS CONTROLLER 6 POCKET ELECTRON BEAM GUN (REBUILT) CHA ELECTRON BEAM POWER SUPPLY CTI CRYOPUMP WITH COMPRESSOR REBUILT 2 STAGE DIRECT DRIVE ROUGHING PUMP
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CHA SE 600 EBEAM SYSTEM
CHA SE 600 EBEAM SYSTEM WITH SINGLE OR 4 POCKET EBEAM GUN, AIRCO TEMESCAL CV8 P/S, 18" BELL JAR SYSTEM, IC-6000 THICK. MON., AUTO VALVING, ION/DUAL THEROCOUPLE GUAGE, 6" PREGANT DIFFUSION PUMP, OR CTI-8 CRYOPUMP, LEYBOLD D30 DIRECT DRIVE ROUGHING PUMP.
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CHA SE 600 EVAPORATOR
CHA SE 600 EVAPORATOR. all manual valving can be configured with diffusion pump or cryopump filiment evaporator -
CHA SE 600 RAP
18" X 30" HIGH S/S BELL JAR INFICON IC-6000 THICKNESS MONITOR AUTOTECH II AUTOMATIC/MANUAL VALVING ION/DUAL TC GAUGE TEMESCAL CV-8 POWER SUPPLY DIFFUSON PUMP (REBUILT) FOUR POCKET GUN (REBUILT)...