BRANSON 3075
BRANSON 3075 PLASMA CLEANER 750 WATT GENERATOR, 3 GAS CAPABILITY 10X20" QUARTZ BARREL

BRANSON 4150
BRANSON 4150 PLASMA ASHER 2 GAS CAPABILITY 15" DIAMETER X 30" DEEP ALUMINUM CHAMBER

BRANSON L3200
BRANSON L3200 CASSETTE TO CASSETTE ASHER INCLUDES FOMBLIN PREPPED PUMPS AND PUMP CART

COMMONWEALTH SCIENTIFIC
Ion Beam System with load lock for up to 3 inch diameter substrates

LFE 1002
STANDARD LFE 1002 DUAL BARREL ETCHER 10" DIAMETER CHAMBER X 16" LONG (3 GAS CAPABILITY) INCLUDES (2) FOMBLIN PREPPED DIRECT DRIVE VACUUM PUMPS DOES NOT INCLUDE FOMBLIN OIL PLANAR ELECTRODE VERSION FOR 0.5 MICRON RESOLUTION AVAILABLE ALSO

LFE 3O1
LFE 3O1 PLASMA CLEANER APPROX 8" DIAMETER X 6" DEEP QUARTZ BARREL

LFE 501
STANDARD LFE 501 BARREL ETCHER 10" DIAMETER CHAMBER X 16" LONG (3 GAS CAPABILITY) INCLUDES FOMBLIN PREPPED DIRECT DRIVE VACUUM PUMP DOES NOT INCLUDE FOMBLIN OIL PLANAR ELECTRODE VERSION FOR 0.5 MICRON RESOLUTION AVAILABLE ALSO

LFE 501 300mm PLANAR ETCHER
14" DIAMETER CHAMBER X 16" LONG
(3 GAS CAPABILITY)
FOR UP TO 12" OR 300 MM WAFERS

LFE 501 PLANAR 300mm RIE ETCHER
14" DIAMETER CHAMBER X 16" LONG
(3 GAS CAPABILITY)
FOR UP TO 12" OR 300 MM WAFERS

LFE 501 300mm BARREL ETCHER
14" DIAMETER CHAMBER X 16" LONG
(3 GAS CAPABILITY)
FOR UP TO 12" OR 300 MM WAFERS

TEGAL 211
TABLE TOP PLASMA ETCHER/ASHER
FOR UP TO 3" DIAMETER WAFERS
ALUMINUM CHAMBER WITH TIMER 0-99 MINUTES

TEGAL 411
TEGAL 411 PLASMA ASHER ALUMINUM CHAMBER FOR CASSETTES OF 4" WAFERS ( AND SMALLER)

Tegal 415
Up to 5" wafers, digital timer and pressure gage. Optional fomblin prepped pump.

YES R3
YES R3 DOWN STREAM PLASMA CLEANER
LARK SEQUENCER
YES 500 GENERATOR
2 GAS INPUTS
REBUILT DIRECT DRIVE VACUUM PUMP IS ALSO AVAILABLE