Equipment
Etchers
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Anatech P600
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BRANSON 3075
BRANSON 3075 PLASMA CLEANER 750 WATT GENERATOR, 3 GAS CAPABILITY 10X20" QUARTZ BARREL -
BRANSON 4150
BRANSON 4150 PLASMA ASHER 2 GAS CAPABILITY 15" DIAMETER X 30" DEEP ALUMINUM CHAMBER
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BRANSON L3200
BRANSON L3200 CASSETTE TO CASSETTE ASHER INCLUDES FOMBLIN PREPPED PUMPS AND PUMP CART
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COMMONWEALTH SCIENTIFIC
Ion Beam System with load lock for up to 3 inch diameter substrates
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LFE 1002
STANDARD LFE 1002 DUAL BARREL ETCHER 10" DIAMETER CHAMBER X 16" LONG (3 GAS CAPABILITY) INCLUDES (2) FOMBLIN PREPPED DIRECT DRIVE VACUUM PUMPS DOES NOT INCLUDE FOMBLIN OIL PLANAR ELECTRODE VERSION FOR 0.5 MICRON RESOLUTION AVAILABLE ALSO
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LFE 3O1
LFE 3O1 PLASMA CLEANER APPROX 8" DIAMETER X 6" DEEP QUARTZ BARREL -
LFE 501
STANDARD LFE 501 BARREL ETCHER 10" DIAMETER CHAMBER X 16" LONG (3 GAS CAPABILITY) INCLUDES FOMBLIN PREPPED DIRECT DRIVE VACUUM PUMP DOES NOT INCLUDE FOMBLIN OIL PLANAR ELECTRODE VERSION FOR 0.5 MICRON RESOLUTION AVAILABLE ALSO
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LFE 501 300mm PLANAR ETCHER
14" DIAMETER CHAMBER X 16" LONG
(3 GAS CAPABILITY)
FOR UP TO 12" OR 300 MM WAFERS
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LFE 501 PLANAR 300mm RIE ETCHER
14" DIAMETER CHAMBER X 16" LONG
(3 GAS CAPABILITY)
FOR UP TO 12" OR 300 MM WAFERS
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LFE 501 300mm BARREL ETCHER
14" DIAMETER CHAMBER X 16" LONG
(3 GAS CAPABILITY)
FOR UP TO 12" OR 300 MM WAFERS
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TEGAL 211
TABLE TOP PLASMA ETCHER/ASHER
FOR UP TO 3" DIAMETER WAFERS
ALUMINUM CHAMBER WITH TIMER 0-99 MINUTES
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TEGAL 411
TEGAL 411 PLASMA ASHER ALUMINUM CHAMBER FOR CASSETTES OF 4" WAFERS ( AND SMALLER)
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Tegal 415
Up to 5" wafers, digital timer and pressure gage. Optional fomblin prepped pump.
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YES R3
YES R3 DOWN STREAM PLASMA CLEANER
LARK SEQUENCER
YES 500 GENERATOR
2 GAS INPUTS
REBUILT DIRECT DRIVE VACUUM PUMP IS ALSO AVAILABLE