BRANSON 3075
BRANSON 3075 QUARTZ BARREL ETCHER
NEW PROGRAMMABLE CONTROLLER
(MENU DRIVEN) 1 YEAR WARRANTY ON NEW ELECTRONICS
3 GAS INPUTS
750 WATT RF GENERATOR

COMMONWEALTH SCIENTIFIC
Ion Beam System with load lock for up to 3 inch diameter substrates

LFE 1002
STANDARD LFE 1002 DUAL BARREL ETCHER 10" DIAMETER CHAMBER X 16" LONG (3 GAS CAPABILITY) INCLUDES (2) FOMBLIN PREPPED DIRECT DRIVE VACUUM PUMPS DOES NOT INCLUDE FOMBLIN OIL PLANAR ELECTRODE VERSION FOR 0.5 MICRON RESOLUTION AVAILABLE ALSO

LFE 3O1
LFE 3O1 PLASMA CLEANER APPROX 8" DIAMETER X 6" DEEP QUARTZ BARREL

LFE 501
STANDARD LFE 501 BARREL ETCHER 10" DIAMETER CHAMBER X 16" LONG (3 GAS CAPABILITY) INCLUDES FOMBLIN PREPPED DIRECT DRIVE VACUUM PUMP DOES NOT INCLUDE FOMBLIN OIL PLANAR ELECTRODE VERSION FOR 0.5 MICRON RESOLUTION AVAILABLE ALSO

LFE 501 300mm PLANAR ETCHER
14" DIAMETER CHAMBER X 16" LONG
(3 GAS CAPABILITY)
FOR UP TO 12" OR 300 MM WAFERS

LFE 501 PLANAR 300mm RIE ETCHER
14" DIAMETER CHAMBER X 16" LONG
(3 GAS CAPABILITY)
FOR UP TO 12" OR 300 MM WAFERS

LFE 501 300mm BARREL ETCHER
14" DIAMETER CHAMBER X 16" LONG
(3 GAS CAPABILITY)
FOR UP TO 12" OR 300 MM WAFERS

TEGAL 211
TABLE TOP PLASMA ETCHER/ASHER
FOR UP TO 3" DIAMETER WAFERS
ALUMINUM CHAMBER WITH TIMER 0-99 MINUTES

TEGAL 411
TEGAL 411 PLASMA ASHER ALUMINUM CHAMBER FOR CASSETTES OF 4" WAFERS ( AND SMALLER)

TEGAL 415 PLASMA ASHER
TEGAL 415 PLASMA ASHER
ALUMINUM CHAMBER ID 6X6X10" WIDE
REBUILT DIRECT DRIVE PUMP AVAILABLE FOR ADDITIONAL FEE
FOMBLIN/KRYTOX PREP (IF PUMPING EXPLOSIVE GAS) ALSO AVAILABLE FOR ADDITIONAL FEE
RECLAIMED...

Tegal 515 Plasma Asher
Aluminum Chamber for Up To 5" Wafers
Single Gas Input
Optional Dual Gas Control Box is Available

Tegal 965 Plasma Asher
6"(150mm) Capable