Equipment
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BRANSON L3200
BRANSON L3200 CASSETTE TO CASSETTE ASHER INCLUDES FOMBLIN PREPPED PUMPS AND PUMP CART -
BRANSON 3075
BRANSON 3075 QUARTZ BARREL ETCHER
NEW PROGRAMMABLE CONTROLLER
(MENU DRIVEN) 1 YEAR WARRANTY ON NEW ELECTRONICS
3 GAS INPUTS
750 WATT RF GENERATOR -
COMMONWEALTH SCIENTIFIC
Ion Beam System with load lock for up to 3 inch diameter substrates -
LFE 1002
STANDARD LFE 1002 DUAL BARREL ETCHER 10" DIAMETER CHAMBER X 16" LONG (3 GAS CAPABILITY) INCLUDES (2) FOMBLIN PREPPED DIRECT DRIVE VACUUM PUMPS DOES NOT INCLUDE FOMBLIN OIL PLANAR ELECTRODE VERSION FOR 0.5 MICRON RESOLUTION AVAILABLE ALSO -
LFE 3O1
LFE 3O1 PLASMA CLEANER APPROX 8" DIAMETER X 6" DEEP QUARTZ BARREL -
LFE 501
STANDARD LFE 501 BARREL ETCHER 10" DIAMETER CHAMBER X 16" LONG (3 GAS CAPABILITY) INCLUDES FOMBLIN PREPPED DIRECT DRIVE VACUUM PUMP DOES NOT INCLUDE FOMBLIN OIL PLANAR ELECTRODE VERSION FOR 0.5 MICRON RESOLUTION AVAILABLE ALSO -
LFE 501 300mm PLANAR ETCHER
14" DIAMETER CHAMBER X 16" LONG
(3 GAS CAPABILITY)
FOR UP TO 12" OR 300 MM WAFERS
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LFE 501 PLANAR 300mm RIE ETCHER
14" DIAMETER CHAMBER X 16" LONG
(3 GAS CAPABILITY)
FOR UP TO 12" OR 300 MM WAFERS
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LFE 501 300mm BARREL ETCHER
14" DIAMETER CHAMBER X 16" LONG
(3 GAS CAPABILITY)
FOR UP TO 12" OR 300 MM WAFERS
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OXFORD 80
REACTIVE ION ETCHER (RIE)
Video Demonstration of Oxford 80 RIE Systems Forward and Reflected Power
Video Demonstration of Oxford 80 RIE Systems Pump Down Sequence... -
PLASMA SCIENCES RIE 600W
PLASMA SCIENCES
PLASMA SCIENCES RIE 600W FOR 12" WAFERS
600 WATT POWER SUPPLYMECHANICAL PUMP -
TEGAL 211
TABLE TOP PLASMA ETCHER/ASHER
FOR UP TO 3" DIAMETER WAFERS
ALUMINUM CHAMBER WITH TIMER 0-99 MINUTES
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TEGAL 411
TEGAL 411 PLASMA ASHER ALUMINUM CHAMBER FOR CASSETTES OF 4" WAFERS ( AND SMALLER) -
TEGAL 415 PLASMA ASHER
TEGAL 415 PLASMA ASHER
ALUMINUM CHAMBER ID 6X6X10" WIDE
REBUILT DIRECT DRIVE PUMP AVAILABLE FOR ADDITIONAL FEE
FOMBLIN/KRYTOX PREP (IF PUMPING EXPLOSIVE GAS) ALSO AVAILABLE FOR ADDITIONAL FEE
RECLAIMED... -
Tegal 515 Plasma Asher
Aluminum Chamber for Up To 5" Wafers
Single Gas Input
Optional Dual Gas Control Box is Available
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Tegal 965 Plasma Asher
6"(150mm) Capable