Guaranteed Refurbished Semiconductor Manufacturing Equipment

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  • Email: J@JMIND.COM
  • Phone: (978) 663-5376
  • Fax: (978) 663-5433
  • J Cell Phone: (978) 771-0481 (Call or Text)
  • Mail:
    55 High St, Bldg 7
    North Billerica, MA 01862

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Tegal 515 Plasma Asher

Image of Tegal 515 Plasma Asher

Manufacturer: Tegal

Aluminum Chamber for Up To 5" Wafers
Single Gas Input
Optional Dual Gas Control Box is Available

Please note: JMI has thousands of machines in stock and the photo of the item taken at our facility is for reference. There may be multiple models of this item in stock. JMI will email a video of any machine purchased under payment terms agreed, demonstrating operation (prior to shipment) at your request.

We also list some of our equipment ready to go now on Ebay!

JMI has been selling refurbished semiconductor manufacturing equipment
for over 30 years. Experienced technicians and a vast inventory of machines
and parts enables JMI to offer support on the majority of tools we sell....
for many years after the Original equipment manufacturer (OEM) does not.

Many tools are also listed on ebay if you prefer to purchase on line immediately.

To avoid Ebay commissions, you can also put most machines on hold immediately
by calling or texting J on his cell phone 978-771-0481.

Click here to see our items for sale on Ebay

Reasons to Choose J.M. Industries, INC

  • JM Industries is selling this item in good condition and fully operational. The refurbished Tegal 515 Plasma Asher comes with a 30 day warranty. (extended warranties are available for an additional cost).
  • If you purchase the Tegal 515 Plasma Asher, JMI will fully test the item. In many cases JMI will also run your product with the Tegal 515 Plasma Asher to minimize your set up time. (just ask).
  • Buy the Tegal 515 Plasma Asher direct and avoid broker commissions.
  • Email us for more photos of the guaranteed Tegal 515 Plasma Asher. Feel free to call us with any questions regarding the machine in stock. Also contact JMI to learn about options that may be available for this item.
  • If there are any special details that are critical on the Tegal 515 Plasma Asher for your process, please let us know so we can be sure it meets your needs.
  • J.M. Industries offers support for many other machines, like the Tegal 515 Plasma Asher, even after the OEM (Original Equipment Manufacturer) discontinues offering parts or service.
  • Please inspect all shock watch indications when you receive the Tegal 515 Plasma Asher from J.M. Industries before signing the bill of lading to ensure the Tegal 515 Plasma Asher has been delivered in the same good condition it was shipped.
  • If would would like to see an emailed video of the Tegal 515 Plasma Asher you have purchased in operation prior to shipment, please let us know. Please note: We may need a deposit prior to sending a video of the Tegal 515 Plasma Asher to cover techncian costs.

About JMI *

Yes R3 Plasma Cleaner
Lark Sequencer
Yes 500 Generator 2 Gas inputs, 2 shelves 12.75x12.75" { 325 square inches }

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