Maximum Operating Temperature
Minimum Vacuum Level
100 millitorr (0.1 mbar)
Maximum Operating Pressure
50 psig (4.5 bar)
5.0 x 4.0 in (125 x 100 mm)
Recommended process area
3.5 x 3.5 in (90 x 90 mm)
Thermal uniformity process area
5 Â°C or better
Maximum heating rate in vacuum
Typical forced cooling rate
Clearance over hot plate
2 in (50 mm)
(W x D x H) 30.5 x 25 x 19 in (78 x 64 x 48 cm)
180 lb (80 kg)
2.8 kVA maximum at 220/110 volts single phase
Nitrogen plus 1 optional at 75 psig (3.5 kg/cm2)
Optional â€“ 1 gpm at 30 psig (4 lpm at 2 kg/cm2)
Please note: JMI has thousands of machines in stock and the photo of the item taken at our facility is for reference. There may be multiple models of this item in stock. JMI will email a video of any machine purchased under payment terms agreed, demonstrating operation (prior to shipment) at your request.
JMI has been selling refurbished semiconductor manufacturing equipment for over 40 years. Experienced technicians and a vast inventory of machines and parts enables JMI to offer support on the majority of tools we sell….for many years after the Original equipment manufacturer (OEM) does not.
Many tools are also listed on ebay if you prefer to purchase online immediately.
To avoid Ebay commissions, you can also place most machines on hold immediately by calling or texting J on his cell phone (978) 771-0481.