The Edwards E2M5 pump speed is 4 CFM at 60Hz.
It’s flange is NW25 with 15 mm nozzle alternative.
It’s maximum inlet pressure for water vapor is 11 torr.
The motor runs at 0.37 kW at 60Hz.
The oil capacity minimum is 0.42 liter and the maximum is 0.55 liter.
The weight of this pump is 43 lbs.
Please note: JMI has thousands of machines in stock and the photo of the item taken at our facility is for reference. There may be multiple models of this item in stock. JMI will email a video of any machine purchased under payment terms agreed, demonstrating operation (prior to shipment) at your request.
JMI has been selling refurbished semiconductor manufacturing equipment for over 40 years. Experienced technicians and a vast inventory of machines and parts enables JMI to offer support on the majority of tools we sell….for many years after the Original equipment manufacturer (OEM) does not.
Many tools are also listed on ebay if you prefer to purchase online immediately.
To avoid Ebay commissions, you can also place most machines on hold immediately by calling or texting J on his cell phone (978) 771-0481.