150mm PROBE STATION (AVAILABLE WITH 6″ HOT CHUCK)
INCLUDES B&L STEREO ZOOM 7 OPTICS, OR CAN BE UPGRADED TO
MICROZOOM HIGH POWER OPTICS
Vacuum and wiring Manifold: Located on both sides of the platen,
each manifold has six vacuum ports
to accommodate vacuum base micropositioners. Also, six color-coded electrical jacks are wired to the
corresponding colored banana jacks at the rear of the probe station.
Base Plate Large black anodized base plate machined from 5/8″ aluminum stock.
Stage Control Knobs: Knobs move wafer chuck stage a full 5″ in both the X and Y direction at a speed of four knob revolutions per inch.
Rotation Knob: This knob rotates the 5″ chuck a full 360 degrees.
Chuck Z Motion: This knob raises and lowers the chuck to the desired probing height. The chuck has a total movement of 1 1/2″.
Vacuum Toggle Switch
Platen Lift Lever The lever drives the four point platen lift and lifts the platen, maintaining a horizontal plane. The platen may be stopped at any point of the1/4″ travel.
Nickel-chrome Plated Steel Platen: The large 3/8″ steel platen will accomidate up to 12 vacuum-base or magnetic base micropositioners.
5″ Nickel-chrome Plated Brass Chuck: The chuck is plumbed for vacuum and has a connection for
grounding. The chuck has also been ground flat to + or – .001 inches.
Vacuum Toggle Switch: This toggle controls the vacuum to all vacuum ports for vacuum hold-down micropositioners.
Microscope Stage: Easily accessable crank-style knob allows 2 inches of smooth X-Y microscope
Please note: JMI has thousands of machines in stock and the photo of the item taken at our facility is for reference. There may be multiple models of this item in stock. JMI will email a video of any machine purchased under payment terms agreed, demonstrating operation (prior to shipment) at your request.
JMI has been selling refurbished semiconductor manufacturing equipment for over 40 years. Experienced technicians and a vast inventory of machines and parts enables JMI to offer support on the majority of tools we sell….for many years after the Original equipment manufacturer (OEM) does not.
Many tools are also listed on ebay if you prefer to purchase online immediately.
To avoid Ebay commissions, you can also place most machines on hold immediately by calling or texting J on his cell phone (978) 771-0481.