Displacement (swept volume)
60 Hz 6.7cfm
Speed (Pneurop) 60 Hz 5.8 cfm
without gas ballast 0.75×10-5 torr
without gas ballast (totalpressure) 0.75×10-4 torr
with gas ballast (partial
pressure) 2.25×10-2 torr
Inlet connection NW25 flange with 15 mm nozzle alternative
Outlet connection Nozzle 15 mm external diameter
Maximum inlet pressure
for water vapor 11 torr
Motor 50 Hz 0.37 kW
Motor 60 Hz 0.37 kW
Oil capacity-maximum 0.55 liter
minimum 0.43 liter
Recommended Edwards oil Supergrade A
Please note: JMI has thousands of machines in stock and the photo of the item taken at our facility is for reference. There may be multiple models of this item in stock. JMI will email a video of any machine purchased under payment terms agreed, demonstrating operation (prior to shipment) at your request.
JMI has been selling refurbished semiconductor manufacturing equipment for over 40 years. Experienced technicians and a vast inventory of machines and parts enables JMI to offer support on the majority of tools we sell….for many years after the Original equipment manufacturer (OEM) does not.
Many tools are also listed on ebay if you prefer to purchase online immediately.
To avoid Ebay commissions, you can also place most machines on hold immediately by calling or texting J on his cell phone (978) 771-0481.