Equipment
Sputterers
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Airco Temescal HRS 2550
AIRCO TEMESCAL HRS 2550 SPUTTERING SYSTEM
3 TARGETS
AUTO/MANUAL VALVING
DIRECT DRIVE MECHANICAL PUMP
DIFFUSION PUMP
CAN BE UPGRADED WITH ROTATING FIXTURE TO HOLD (4) 8" WAFERS
The Airco...
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Temescal 2550
CV 14, 14kw electron beam power supply choose diffusion or cryopump choose single pocket, 4 pocket or 6 pocket electron beam gun.
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Anatech Hummer VI
sputter coater (SEM coater) with Leybold direct drive 2 stage pump
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Perkin Elmer 4450 Series
* 3 delta targets, DC and RF P/S
* CTI 8 Cryopump, turbo pumped load lock
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Torr International CRC 150
*Table top sputtering system
*8" diameter X 8" tall chamber, with etch option
