Equipment
Karl Suss
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Karl Suss MJB3 Aligner
Front and backside alignment capability
350 watt lamp
High resolution alignment for up to 3" wafers
Soft contact option
2.5x, 5x, 20x and 32x microscope objectives
Infrared back side alignment (BSA) Click...
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KARL SUSS RA120M
120mm X 120mm TRAVEL
SCRIBE RANGE WITH SKIP IS 3X3"
SMALLEST STEPS: X=5 MICRONS, Y=1 MICRON (5 MICRON ACCURACY OVER 3")
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KARL SUSS MA 45
MASK ALIGNER FOR THIN FILM AND HYBRID APPLICATIONS. WAFERS UP TO 4.5"X5" AREA.
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Karl Suss MA 6
KARL SUSS MA 6 MASK ALIGNER
1000 WATT POWER SUPPLY
1 MICRON RESOLUTION ON 6" WAFERS
IR BACK SIDE ILLUMINATION
SPLIT FIELD MICROSCOPE WITH 6 OBJECTIVES
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Karl Suss MA1006
KARL SUSS MA1006 MASK ALIGNER
1000 WATT POWER SUPPLY 1 MICRON RESOLUTION ON 6" WAFERS SPLIT FIELD MICROSCOPE WITH 6 OBJECTIVES
Similar to K&S MA 6
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KARL SUSS MA4 MASK ALIGNER
KARL SUSS MA4 MASK ALIGNER
350 WATT POWER SUPPLY
1 MICRON RESOLUTION ON UP TO 4" WAFERS
NEW SPLIT FIELD VIDEO OPTICS
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Karl Suss MJB3 Aligner
KARL SUSS MJB3 Mask ALIGNER
FRONT SIDE ALIGNMENT
350 WATT LAMP
HIGH RESOLUTION ALIGNMENT FOR UP TO 3" WAFER
NEW DIGITAL VIDEO CAMERA
FLAT SCREEN VGA MONITOR
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Karl Suss MJB3
200 WATT LAMP
HIGH RESOLUTION ALIGNMENT FOR UP TO 3" WAFERS
SOFT CONTACT OPTION
3.2X, 20X, 32X OBJECTIVES
