Equipment
Oriel
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Oriel Double Sided Mask Aligner
* Dual Oriel 8073 Exposure Heads
with 10" collimating lenses, for up to 8" 200mm wafers.
* Dual 1000 watt power supplies.
* Dual 1000 watt lamps.
* Estimated resolution 2-3 microns
* Note: system does not Include Mask/Substrate holders
please email your...
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ORIEL UV POWER SUPPLY
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ORIEL/NEWPORT 81294 SOLAR SIMULATOR
1000 WATT POWER SUPPLY 16" DIAMETER COLLIMATING LENS 9 X 12" MIRROR (LONG PART PARALLEL WITH LONG PART OF SYSTEM) MODEL 68820 POWER SUPPLY (SIMULATES SUN IN SPACE, WE WILL QUOTE AIR MASS FILTER UPON REQUEST)
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Oriel 8097
Manufacturer: Oriel ORIEL 8097 MASK ALIGNER 10" DIAMETER LENS 350 WATT LAMP (CAN BE UPGRADED TO HIGHER POWER FOR ADDITIONAL COST) 4X4" MASK HOLDER (CAN BE UPGRADED TO UP TO 9X9" FOR 8" WAFERS FOR ADDITIONAL COST)