Equipment
Sloan
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SLOAN DEKTAK II
SLOAN DEKTAK II Measurement display range 20-65,000 nm or 200-655,000 angstroms
5 angstrom (0.5nm) vertical resolution
Scan length 50 microns to 30mm
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SLOAN M-100
The Sloam M-100 wafer tester has an interferometer, which measures wafter thickness by optical fringes. This wafter tester includes a camera. -
Sloan/Veeco Dektak IIA
Specifications
Measurement Display Range ... 200 A to 655,000 A
(20nm to 65,000nm)
Vertical Resolution ... 5A (.5nm)
Scan Length ... 50 microns to 30mm
Scan time ... .4 to 65 seconds (depending on
scan length and speed range)
Leveling ... ....