Equipment
LFE
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LFE 1002
STANDARD LFE 1002 DUAL BARREL ETCHER 10" DIAMETER CHAMBER X 16" LONG (3 GAS CAPABILITY) INCLUDES (2) FOMBLIN PREPPED DIRECT DRIVE VACUUM PUMPS DOES NOT INCLUDE FOMBLIN OIL PLANAR ELECTRODE VERSION FOR 0.5 MICRON RESOLUTION AVAILABLE ALSO
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LFE 3O1
LFE 3O1 PLASMA CLEANER APPROX 8" DIAMETER X 6" DEEP QUARTZ BARREL -
LFE 501
STANDARD LFE 501 BARREL ETCHER 10" DIAMETER CHAMBER X 16" LONG (3 GAS CAPABILITY) INCLUDES FOMBLIN PREPPED DIRECT DRIVE VACUUM PUMP DOES NOT INCLUDE FOMBLIN OIL PLANAR ELECTRODE VERSION FOR 0.5 MICRON RESOLUTION AVAILABLE ALSO
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LFE 501 300mm PLANAR ETCHER
14" DIAMETER CHAMBER X 16" LONG
(3 GAS CAPABILITY)
FOR UP TO 12" OR 300 MM WAFERS
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LFE 501 PLANAR 300mm RIE ETCHER
14" DIAMETER CHAMBER X 16" LONG
(3 GAS CAPABILITY)
FOR UP TO 12" OR 300 MM WAFERS
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LFE 501 300mm BARREL ETCHER
14" DIAMETER CHAMBER X 16" LONG
(3 GAS CAPABILITY)
FOR UP TO 12" OR 300 MM WAFERS