Equipment
Tegal
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TEGAL 211
TABLE TOP PLASMA ETCHER/ASHER
FOR UP TO 3" DIAMETER WAFERS
ALUMINUM CHAMBER WITH TIMER 0-99 MINUTES
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TEGAL 411
TEGAL 411 PLASMA ASHER ALUMINUM CHAMBER FOR CASSETTES OF 4" WAFERS ( AND SMALLER)
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TEGAL 415 PLASMA ASHER
TEGAL 415 PLASMA ASHER
ALUMINUM CHAMBER ID 6X6X10" WIDE
REBUILT DIRECT DRIVE PUMP AVAILABLE FOR ADDITIONAL FEE
FOMBLIN/KRYTOX PREP (IF PUMPING EXPLOSIVE GAS) ALSO AVAILABLE FOR ADDITIONAL FEE
RECLAIMED...
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Tegal 515 Plasma Asher
Aluminum Chamber for Up To 5" Wafers
Single Gas Input
Optional Dual Gas Control Box is Available
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Tegal 965 Plasma Asher
6"(150mm) Capable
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Tegal 411 Plasma Asher
TEGAL 411 PLASMA ASHER ALUMINUM CHAMBER ID 6X6X10" WIDE