Equipment
Wafer Test
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ADE 6033 Wafer Tester
WAFER TESTER FOR WAFER THICKNESS
INCLUDES LARGE ANVIL STYLE TABLE
TO HOLD SMALL OR LARGE SUBSTRATES
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KLA 2029,2020,2025
WAFER INSPECT/DEFECT DETECTOR. -
KLA-Tencor 6200 Surfscan
Surface particle analysis system.
Scans unpatterned wafers ( 100mm to 200mm)
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MTI INSTRUMENTS PROFORMA 300
Non Contact Thickness Measurement tool (For Wafers)
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NANOSPEC 210
The Nanospec 210 is a wafer tester that has a film thickness measurement system. It has a 100 angstrom resolution.
Click here to see a demo of the Nanospec 210!
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PROMETRIX SM200E
FOR MEASURING DIELECTRIC THIN FILMS ON WAFERS UP TO 8" DIAMETER INCLUDES COMPUTER WITH MAPPING
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SLOAN M-100
The Sloam M-100 wafer tester has an interferometer, which measures wafter thickness by optical fringes. This wafter tester includes a camera. -
Sloan/Veeco Dektak IIA
Specifications
Measurement Display Range ... 200 A to 655,000 A
(20nm to 65,000nm)
Vertical Resolution ... 5A (.5nm)
Scan Length ... 50 microns to 30mm
Scan time ... .4 to 65 seconds (depending on
scan length and speed range)
Leveling ... ....
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Alphastep 200
AlphaStep 200
Computerized Surface
Profiler
The AlphaStep 200 sets a new standard in computerized surface profiling-incorporating Tencor Instruments' latest innovations in profiling technology, digital data handling and information display. It features computerized...
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TENCOR SIGMASCAN
STYLES PROFILOMETER -
TENCOR SURFSCAN
WAFER DEFECT/CONTAMINATION SURFACE ANALYZER, DEFECT SIZE RANGE PROG. (1um2&255um2) -
TENCOR ALPHASTEP 100
STYLUS PROFILOMETER FOR METAL THICKNESS MEASURMENT.
Click here for a demo of the Tencor Alphastep 100
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Sloan/Veeco Dektak IIA
Specifications
Measurement Display Range ... 200 A to 655,000 A
(20nm to 65,000nm)
Vertical Resolution ... 5A (.5nm)
Scan Length ... 50 microns to 30mm
Scan time ... .4 to 65 seconds (depending on
scan length and speed range)
Leveling ... ....
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VEECO DEKTAK3030
STYLUS TYPE PROFILOMETER FOR MEASURING STEPS ON UP TO 6" WAFERS 360 DEGREE STAGE ROTATION 100 ANGSTROM TO 1310K ANGSTROM RANGE MAXIMUM VERTICAL RESOLUTION OF 1 ANGSTROM SERVICED BY FACTORY TRAINED TECHNICIAN
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VEECO FPP 100
4 POINT PROBE WITH DIGITAL R/O.
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VEECO FPP 100
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VEECO SLOAN DEKTAK IIA
Stylus Profilometer used in making accurate measurements on small vertical features ranging in height from 100-655000 angstroms (INCLUDES VIDEO CAMERA AND MONITOR)