Equipment
PROFILOMETERS
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SLOAN DEKTAK II
SLOAN DEKTAK II Measurement display range 20-65,000 nm or 200-655,000 angstroms
5 angstrom (0.5nm) vertical resolution
Scan length 50 microns to 30mm
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KLA/TENCOR P2
KLA/TENCOR P2 Scan Length: 210mm. (8")
Scan Speed: 1 um/sec to 25mm/sec.
Vertical range: +/- 6.5um at 1A resolution & +/- 150um at 25A....
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VEECO DEKTAK 3030
VEECO DEKTAK 3030 WITH MOTORIZED STAGE,
VIDEO CAMERA, MONITOR AND COMPUTER